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Using Shengding's patented intermediate frequency digital power supply to ensure uniform plasma and stable processing

Microwave in-line vacuum plasma cleaning machine specially designed for the semiconductor industry, for semiconductor chip bonding pretreatment, plastic sealing pretreatment, photoresist removal, metal bonding pretreatment. The plasma is not charged

The plasma of free radical molecules has no bias, will not cause electrical damage to the product, and the degumming rate is high

Quickly and effectively remove floating particles on the surface of the product, 97% removal rate of 3um dust particles, 98% removal rate of 6um dust particles

Quickly and effectively remove floating particles on the surface of the product, the removal rate of 3μm dust particles is 97%, and the removal rate of 6μm dust particles is 98%

0.9S high-efficiency static elimination, gas-electric separation structure, support 485 communication interface, can be connected to MES system